The Wikipedia article on chemical vapor deposition, consulted for its definition as a thin-film deposition method and for the 1960 coining of the term by John M. Blocher, Jr. This description is adapted from Wikipedia contributors under CC BY-SA 4.0; changes were made. https://creativecommons.org/licenses/by-sa/4.0/
Facts
AuthorWikipedia contributors
PublisherWikimedia Foundation
URLhttps://en.wikipedia.org/wiki/Chemical_vapor_deposition
Source TypeReference Work
Reliability Tier2
Sources
Chemical Vapor Deposition (Wikipedia)
Claims Backed By This Source (10 claims)
This source backs 10 claims across the atlas. As facts: 8 well-attested. Plus 2 entities citing it as a general reference with no single fact or relationship attached.
Disposition By Topic
- Sources, 6 claims: 6 well-attested.
- Methods, 4 claims: 2 well-attested, 2 general references.
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